Non-Volatile Memory and Semiconductor Device

ABSTRACT

There is provided a non-volatile memory which enables high accuracy threshold control in a writing operation. In the present invention, a drain voltage and a drain current of a memory transistor are controlled to carry out a writing operation of a hot electron injection system, which is wherein a charge injection speed does not depend on a threshold voltage. FIGS.  1 A and  1 B are views of a circuit structure for controlling the writing. In FIGS.  1 A and  1 B, an output of an operational amplifier  103  is connected to a control gate of a memory transistor  101 , a constant current source  102  is connected to a drain electrode, and a source electrode is grounded. The constant current source  102  and a voltage Vpgm are respectively connected to two input terminals of the operational amplifier  103.

This application is a continuation of copending U.S. application Ser.No. 12/407,539 filed on Mar. 19, 2009 which is a divisional of U.S.application Ser. No. 11/924,090 filed on Oct. 25, 2007 (now U.S. Pat.No. 7,512,006) which is a divisional of U.S. application Ser. No.11/109,325 filed on Apr. 19, 2005 (now U.S. Pat. No. 7,298,652 issuedNov. 20, 2007) which is a continuation of U.S. application Ser. No.10/383,209, filed on Mar. 6, 2003 (now U.S. Pat. No. 6,914,818 issuedJul. 5, 2005) which is a divisional of U.S. application Ser. No.09/976,770 filed on Oct. 12, 2001 (now U.S. Pat. No. 6,556,475 issuedApr. 22, 2003).

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to a semiconductor non-volatile memory,and particularly to an electrically writable and erasable semiconductornon-volatile memory (also called an EEPROM or Electrically Erasable andProgrammable Read Only Memory). The present invention is particularlyeffective for a semiconductor non-volatile memory using a multi-valuetechnique. Besides, the present invention relates to a semiconductordevice including the semiconductor non-volatile memory.

2. Description of the Related Art

In the present specification, an electrically writable and erasablesemiconductor non-volatile memory (EEPROM) indicates all semiconductornon-volatile memories in which electrical writing and electrical erasingare literally enabled, and includes, for example, a full function EEPROMand a flash memory in its category. Unless otherwise specified, thenon-volatile memory and the semiconductor non-volatile memory are usedto mean the EEPROM. Besides, the semiconductor device indicates alldevices functioning by using semiconductor characteristics, andincludes, for example, a microprocessor, an electro-optic devicetypified by a liquid crystal display device and an EL display device,and an electronic equipment incorporating a microprocessor or anelectro-optic device in its category.

In recent years, an electrically writable and erasable semiconductornon-volatile memory (EEPROM), especially a flash memory has attractedattention as a promising candidate of a memory substituting for amagnetic disk or a DRAM. Above all, a so-called multi-value non-volatilememory each memory element of which stores data of three or highervalues has attracted attention as a large capacity memory.

The non-volatile memory is divided into types, such as a NOR type, aNAND type, an AND type or a DINOR type, based on differences in theircircuit structures and operation methods. As a memory elementconstituting the non-volatile memory, there is known a memory transistorincluding a floating gate, a memory transistor including a clusterlayer, a memory transistor having MNOS(Metal-Nitride-Oxide-Semiconductor) structure or MONOS(Metal-Oxide-Nitride-Oxide-Semiconductor) structure, or the like.

In a conventional non-volatile memory, a hot electron injection method(called an HE injection system) and a charge injection method by FNtunnel current (called an FN current system) can be cited as a typicalwriting operation. In the HE injection system, a high control gatevoltage and a high drain voltage are applied to a memory transistor tocause impact ionization, and a generated hot electron is drawn into agate electrode side, so that an electric charge is injected into thememory transistor. On the other hand, in the FN current system, a highvoltage is applied between a control gate electrode and a substrate tocause an FN tunnel current to flow, so that an electric charge isinjected into a memory transistor.

In either case, in order to confirm that a threshold voltage afterwriting is within a predetermined range, verify writing is normallycarried out. Especially, in a multi-value non-volatile memory, since itis necessary to control the threshold voltage after writing with highaccuracy, the verify writing is indispensable. The verify writing is amethod in which a small amount of charge injection and readout forconfirming the threshold voltage are alternately carried out. Thisoperation is repeated until the threshold voltage after writing fallswithin a predetermined range.

In the foregoing method of charge injection, there has been a problemthat it is difficult to control the amount of charge injection withaccuracy. This is because even in the case where the same operationvoltage is applied to the memory transistor, if the charge storageamount of the memory transistor, that is, the threshold voltage isdifferent, the charge injection speed is different.

Thus, naturally in memory transistors having different thresholdvoltages, even in the same memory transistor, the charge injection speedis changed as time elapses. For example, in the case where an electronis injected, a threshold voltage is increased, and an effective gatevoltage seen from a channel region is decreased, so that the chargeinjection speed is decreased.

Further, if the charge injection speed fluctuates by a factor such asfluctuation in film quality of a tunnel oxide film, even if thresholdvoltages of memory transistors before writing are equal to each other, adifference gradually occurs in the charge storage amount. Then, avicious circle occurs in which when a difference occurs in the thresholdvoltage, a charge injection amount further fluctuates.

The verify writing is one of methods for solving such problems. In theverify writing, since confirmation of the threshold voltage is carriedout each time a small amount of charge is injected, it is not necessaryto control the charge injection amount with high accuracy. However, inthe verify writing, the operation of charge injection is divided intoparts, and a readout operation is carried out between them, so thatthere is a problem that it essentially takes a period of time.

Incidentally, also in the verify writing, it is important to control thecharge injection amount with accuracy. By controlling the chargeinjection amount with high accuracy, the number of times of division ofthe charge injection operation can be decreased, and so a verify writingtime period can be shortened.

SUMMARY OF THE INVENTION

The present invention has been made in view of the above problems. Anobject of the present invention is to provide a non-volatile memory forcarrying out a writing operation in which a charge injection amount canbe controlled with high accuracy. Another object of the invention is toprovide a non-volatile memory which realizes shortening of a verifywriting time, and further, realizes substantial shortening of a writingtime by a writing system without using a verify system. A still anotherobject of the invention is to provide a semiconductor device includingsuch a non-volatile memory.

As already described, in the conventional writing method, the chargeinjection speed depends on the charge storage amount of the memorytransistor, and accordingly, depends on the threshold voltage. As aresult, naturally in memory transistors of different states, even in thesame memory transistor, the charge injection speed is changed as timeelapses, and control of the charge injection amount has been difficult.

On the contrary, this means that in order to control the chargeinjection amount with high accuracy, a writing method is effective whichhas a charge injection speed independent on the charge storage amount ofa memory transistor, that is, the threshold voltage. The inventor of thepresent invention has considered that the charge injection speed dependson the threshold voltage of the memory transistor since a control gatevoltage of the memory transistor is directly controlled at the time ofwriting, and has devised, as a new writing method, a method ofcontrolling a drain voltage and a drain current of the memorytransistor.

That is, a non-volatile memory of the present invention is characterizedin that a writing operation of a hot electron injection system iscarried out by controlling a drain voltage and a drain current of amemory transistor. This writing method is characterized in that acontrol gate voltage is not directly controlled, but the control gatevoltage is indirectly controlled so that the drain current becomesconstant, and is characterized in that a charge injection speed does notdepend on a threshold voltage.

In order to understand a writing operation in a non-volatile memory ofthe present invention, a simple circuit for carrying out writing intoone memory element is cited as an example, and its operation method willbe described. FIGS. 1A and 1B are used for the description.

As a memory element, various elements as shown in FIGS. 26A to 26D canbe used (see embodiment 3 for more details). FIG. 26A shows a memorytransistor in which a first insulating film 2602, a cluster layer 2603constituted by semiconductor or conductor clusters 2604, a secondinsulating film 2605, and a control gate electrode 2606 are successivelystacked on an active region 2601, and which is hereinafter referred toas a memory transistor having a cluster layer. FIG. 26D shows a memorytransistor in which a first insulating film 2617, a floating gateelectrode 2618 constituted by a semiconductor film or a conductive film,a second insulating film 2619, and a control gate electrode 2620 aresuccessively stacked on an active region 2616, and which is hereinafterreferred to as a memory transistor having a floating gate. FIGS. 26B and26C show a memory transistor of MNOS structure and a memory transistorof MONOS structure, respectively.

Here, FIG. 1A shows an example of a circuit diagram using, as a memoryelement, the memory transistor having the cluster layer, the memorytransistor of the MNOS structure, or the memory transistor of the MONOSstructure, and FIG. 1B shows an example of a circuit diagram using thememory transistor having the floating gate. As symbolized by symbols ofthe respective memory elements, the memory transistor shown in FIG. 1Ais characterized in that a region for storing an electric charge isspatially discrete, and the memory transistor shown in FIG. 1B ischaracterized in that a region for storing an electric charge iscontinuous. In both cases, the operation methods are quite identical toeach other, and here, the description will be given with reference toFIG. 1A as an example.

The circuit diagram shown in FIG. 1A is composed of a memory transistor101(a), a constant current source 102 for supplying an amount of currentI, and an operational amplifier 103. The output of the operationalamplifier 103 is connected to a control gate electrode of the memorytransistor 101(a), the constant current source 102 is connected to adrain electrode, and a source electrode is grounded. The constantcurrent source 102 and a voltage Vpgm are respectively connected to twoinput terminals of the operational amplifier 103.

The circuit shown in FIGS. 1A and 1B have negative feedbackcharacteristics, and an operation is carried out in a state where twopotentials inputted to the operational amplifier 103 are always equal toeach other. As a result, in the circuit diagram shown in FIG. 1A, thememory transistor 101(a) operates in a state where a drain voltage isequal to Vpgm and a drain current is equal to I.

Actually, in the case where the drain voltage of the memory transistor101(a) is higher than Vpgm, a positive current is outputted from theoperational amplifier 103, and the control gate voltage of the memorytransistor 101(a) is raised. As a result, the conductance of the memorytransistor 101(a) is increased, and the drain voltage is lowered. To thecontrary, in the case where the drain voltage of the memory transistor101(a) is lower than Vpgm, a negative current is outputted from theoperational amplifier 103, and the control gate voltage of the memorytransistor 101(a) is lowered. As a result, it is understood that theconductance of the memory transistor 101(a) is decreased, and the drainvoltage is raised.

In the present invention, as described above, the drain voltage and thedrain current of the memory transistor are controlled, so that thewriting operation of the HE injection system is carried out.Incidentally, Vpgm is called a writing voltage, and I is called awriting current.

When the foregoing writing method is used, and the drain voltage and thedrain current are made constant, a channel region of the memorytransistor has the same state independently of a charge storage amountof a floating gate. That is, the control gate voltage is shifted by thesame amount as a shift of a threshold voltage, and an effective gatevoltage seen from the channel region is brought into a state where it isalways kept constant. Further, if the drain voltage and the draincurrent are constant, a certain amount of hot electron is generated, sothat a charge injection speed to the floating gate becomes constant.

This means that in the case where the writing voltage Vpgm and thewriting current I are constant, a relation between a shift ΔVth of thethreshold voltage of the memory transistor and a writing time tw isexpressed by a straight line as shown by a 201 of FIG. 2. As a result,in the non-volatile memory of the present invention, by controlling thewriting time, it becomes possible to control the threshold voltage withhigh accuracy.

Incidentally, FIG. 2 also shows a relation between a shift of athreshold voltage in a conventional writing method and a writing time(curve 202 of FIG. 2). In the conventional writing method, in the casewhere the control gate voltage is made constant, since an effective gatevoltage seen from the channel region is decreased as time elapses, ashift amount of threshold voltage is decreased. Thus, it is understoodthat it is difficult to control the shift of the threshold voltage withhigh accuracy by controlling the writing time.

In the present invention, the charge injection speed at the time ofwriting can be optimized by setting the drain voltage and the draincurrent of the memory transistor to suitable values. Since the writingmethod of the present invention is the hot electron injection, the drainvoltage is required to have such a magnitude as to generate a hotelectron. On the other hand, if plenty of hot electrons are generated,since the controllability of charge injection amount is lowered, it isnot preferable that the drain voltage is excessively large. It ispreferable that the drain voltage of the memory transistor is 3 V orhigher though it depends on the size of the memory transistor, andoperates in a saturation region relatively close to a linear region.Further, the writing speed is raised by setting the writing voltage Vpgmand the writing current I to large values in such a region, and on theother hand, it becomes possible to suppress consumed current by settingthem to small values. With respect to the writing voltage Vpgm and thewriting current I, the optimum operation points may be set according tothe use of the non-volatile memory.

Besides, since the foregoing writing method is the method of hotelectron injection, an electron having energy much higher than an energybarrier due to a tunnel oxide film is mainly concerned. Thus,fluctuation in film quality of the tunnel oxide film hardly influencesthe injection amount of hot electron, and as compared with the method ofcharge injection by the FN tunnel current, threshold control havinglittle fluctuation becomes possible.

The non-volatile memory of the present invention uses the foregoingwriting operation, so that substantial shortening of a writing time aswill be set forth below becomes possible.

First, reference is made to FIG. 3. FIG. 3 qualitatively shows thresholddistributions after the conventional writing and the writing of thepresent invention are carried out without a verify operation, to amemory transistor with the uniform threshold voltages. A distribution302 expresses a distribution of threshold voltage after the conventionalwriting, and a distribution 301 expresses a distribution of thresholdvoltage after the writing of the present invention. Reference characterVtar designates a set threshold voltage after writing. In FIG. 3, whenthe distribution 302 after the writing of the present invention iscompared with the distribution 301 after the conventional writing, botha difference between the center of the distribution and Vtar, and adistribution width are small (ΔV<ΔV′ and δv<δv′).

In general, in the case where a difference between threshold voltagesexpressing different states is small as compared with a distributionwidth after writing and a distance between centers, since it isimpossible to bring all memory cells into the predetermined state by onewriting operation, verify writing becomes necessary. On the contrary, inthe case where a difference between threshold voltages is larger than adistribution width after writing and a difference between centers, it ispossible to carry out writing by one writing operation. Incidentally,the verify writing is a method in which writing is not carried out atone time, but a small amount of writing and readout for confirming athreshold are alternately carried out. This operation is repeated untila threshold reaches a predetermined value.

In the conventional writing method, since the distribution width δv′after the writing and the difference ΔV′ between the centers are largeas shown in FIG. 3, the method of verify writing is normally used.

In the case where the writing method of the present invention is used,as shown in FIG. 3, since the distribution width δv after the writingand the difference ΔV between the centers are small, even in such adifference between threshold voltages that a verify operation isrequired in the conventional method, it becomes possible to carry out awriting operation in which a verify operation is not carried out.Specifically, in the case where the difference between thresholdvoltages of different states is larger than the distribution width δvand the difference ΔV between the centers after the writing of thepresent invention, the writing operation in which the verify operationis not carried out becomes possible.

Besides, like a multi-value non-volatile memory, in the case where thedifference between threshold voltages expressing different states issmall, even in the case where the writing method according to thepresent invention is used, the verify writing becomes necessary. In thiscase, it is appropriate that the writing operation is constituted by afirst writing operation in which the verify operation is not carried outand a second writing operation in which the verify operation is carriedout. Specifically, writing into a state slightly lower (approximately δvor ΔV) than a final threshold voltage is carried out by the firstwriting operation, and a verify writing operation is carried out for aremaining shortage (approximately δv or ΔV) of the threshold voltage.Since the amount of writing by the second writing operation is verysmall, the number of verify times can be greatly decreased as comparedwith the conventional verify writing.

Thus, in the case where the writing method of the present invention isused, naturally in the writing operation in which the verify operationis not carried out, also in the writing operation in which the verifyoperation is carried out, the number of verify times can be decreased,and it becomes possible to greatly shorten the writing time.

Besides, in the conventional writing method, as shown in FIG. 2, whenthe threshold voltage is increased, the charge injection speed islowered, and the writing operation becomes slow. On the other hand, inthe writing method of the present invention, even in a high thresholdvoltage, the charge injection speed is constant, and the high speedwriting operation becomes possible.

The structure of the present invention will be set forth below.

According to the present invention, there is provided an electricallywritable and erasable non-volatile memory constituted by a memoryelement including a charge storage region between an active region and acontrol gate electrode, characterized in that

an amount of charge injection into the charge storage region iscontrolled by controlling an amount of current flowing through thememory element and a drain voltage of the memory element.

Further, according to the present invention, there is provided anelectrically writable and erasable non-volatile memory constituted by amemory element including a charge storage region between an activeregion and a control gate electrode, characterized in that

charge injection into the charge storage region is carried out bybringing an amount of current flowing through the memory element and adrain voltage of the memory element into a constant state, and

an amount of charge injection into the charge storage region iscontrolled by controlling a period of time for a current flows to thememory element.

Further, according to the present invention, there is provided anelectrically writable and erasable non-volatile memory including atleast a memory cell array in which a plurality of memory cells arearranged in a matrix form and a writing circuit, characterized in that

each of the plurality of memory cells includes a memory element and aselection transistor,

the memory element includes a charge storage region between an activeregion and a control gate electrode, and

the writing circuit carries out a writing operation by controlling anamount of current flowing through the memory element and a drain voltageof the memory element.

Further, according to the present invention, there is provided anelectrically writable and erasable non-volatile memory including atleast a memory cell array in which a plurality of memory cells arearranged in a matrix form and a writing circuit, characterized in that

each of the plurality of memory cells includes a memory element and aselection transistor,

the memory element includes a charge storage region between an activeregion and a control gate electrode,

the writing circuit has a function to hold an amount of current flowingthrough the memory element and a drain voltage of the memory elementconstant, and

the writing circuit carries out a writing operation by controlling aperiod of time for the amount of the current flowing through the memoryelement and the drain voltage of the memory element are held constant.

Further, according to the present invention, there is provided anelectrically writable and erasable non-volatile memory including atleast a memory cell array in which a plurality of memory cells arearranged in a matrix form and a writing circuit, characterized in that

each of the plurality of memory cells includes a memory element and aselection transistor,

the memory element includes a charge storage region between an activeregion and a control gate electrode,

the memory element stores states of k values not less than two values byan erase state having a threshold voltage Vth0, and states having (k−1)different threshold voltages Vth1, Vth2, . . . , Vth(k−1) higher thanthe threshold voltage Vth0,

the writing circuit has a function to hold an amount of current flowingthrough the memory element and a drain voltage of the memory elementconstant,

the writing circuit carries out a writing operation by controlling awriting time in which the amount of the current flowing through thememory element and the drain voltage of the memory element are heldconstant; and

ratios between writing times tw1, tw2, . . . , tw(k−1) for writing fromthe erase state to the states having the threshold voltages Vth1, Vth2,. . . , Vth(k−1) are tw1:tw2: . . . :tw(k−1)=(Vth1−Vth0):(Vth2−Vth0): .. . :(Vth(k−1)−Vth0).

Further, the memory element may store multi-value data.

Further, the non-volatile memory may carry out a readout operation byreading a gate voltage of the memory element.

Further, in a writing operation of the non-volatile memory, a verifyoperation may not be carried out.

Further, the writing operation of the non-volatile memory includes afirst writing operation and a second writing operation, and a verifyoperation is not carried out in the first writing operation while averify operation may be carried out in the second writing operation.

Further, the memory element constituting the non-volatile memory may bea memory transistor in which a first insulating film, a floating gateelectrode constituted by a semiconductor film or a conductive film, asecond insulating film, and a control gate electrode are successivelystacked on the active region.

The memory element constituting the non-volatile memory may be a memorytransistor in which a first insulating film, a cluster layer whichincludes clusters made of semiconductor or conductor as charge-trappedcenters, a second insulating film, and a control gate electrode aresuccessively stacked on the active region.

The memory element constituting the non-volatile memory may be a memorytransistor of MNOS structure or MONOS structure.

Further, there is provided a semiconductor device characterized in thatthe non-volatile memory is used as a recording medium.

Further, there is provided a microprocessor as the semiconductor device.

Further, there is provided a display, a video camera, a goggle display,a DVD player, a head mount display, a personal computer, a portabletelephone, or a car audio, as the semiconductor device.

BRIEF DESCRIPTION OF THE DRAWINGS

In the accompanying drawings:

FIGS. 1A and 1B are circuit diagrams for explaining a writing operationof a non-volatile memory of the present invention;

FIG. 2 is a view showing a relation between a threshold voltage of thenon-volatile memory of the present invention and a writing time;

FIG. 3 is a view showing a threshold distribution after the writingoperation of the non-volatile memory of the present invention;

FIG. 4 is a view showing the whole structure of the non-volatile memoryof the present invention;

FIG. 5 is a view showing the partial structure of the non-volatilememory of the present invention;

FIGS. 6A to 6C are views showing the partial structure of thenon-volatile memory of the present invention;

FIG. 7 is a view showing the partial structure of the non-volatilememory of the present invention;

FIG. 8 is a circuit diagram for explaining a writing operation of thenon-volatile memory of the present invention;

FIG. 9 is a view showing an operation point at the time of writing ofthe non-volatile memory of the present invention;

FIG. 10 is a circuit diagram for explaining a readout operation of thenon-volatile memory of the present invention;

FIG. 11 is a view showing an operation point at the time of readout ofthe non-volatile memory of the present invention;

FIG. 12 is a circuit diagram for explaining an erase operation of thenon-volatile memory of the present invention;

FIG. 13 is a view showing a threshold distribution of the non-volatilememory of the present invention;

FIG. 14 is a view showing the relation between the threshold voltage ofthe non-volatile memory of the present invention and the writing time;

FIG. 15 is a diagram of a writing circuit of the non-volatile memory ofthe present invention;

FIG. 16 is a timing chart at the time of writing of the non-volatilememory of the present invention;

FIG. 17 is a diagram of a writing circuit of the non-volatile memory ofthe present invention;

FIG. 18 is a view showing the whole structure of the non-volatile memoryof the present invention;

FIG. 19 is a view showing a partial structure of the non-volatile memoryof the present invention;

FIG. 20 is a circuit diagram for explaining a writing operation of thenon-volatile memory of the present invention;

FIG. 21 is a circuit diagram for explaining a readout operation of thenon-volatile memory of the present invention;

FIG. 22 is a circuit diagram for explaining an erase operation of thenon-volatile memory of the present invention;

FIG. 23 is a view showing a semiconductor circuit using the non-volatilememory of the present invention;

FIGS. 24A to 24F are views showing electronic instruments using thenon-volatile memory of the present invention;

FIGS. 25A and 25B are views showing electronic instruments using thenon-volatile memory of the present invention; and

FIGS. 26A to 26D are sectional views of memory elements constituting thenon-volatile memory of the present invention.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

The mode for carrying out the invention will next be described.

In this embodiment mode, a description will be given of a circuitstructure of a non-volatile memory for carrying out the foregoingwriting operation and an operation method. Incidentally, here, forsimplification, although the description is given of the case of atwo-value non-volatile memory and a writing method in which a verifyoperation is not carried out, it is easy to apply this embodiment modeto a multi-value non-volatile memory and a case where the verify writingis carried out.

FIG. 4 shows an example of a circuit diagram of a non-volatile memory ofthe present invention including a memory cell array of m rows and ncolumns (m and n are respectively integers equal to or larger than 1).The non-volatile memory shown in FIG. 4 is constituted by a memory cellarray 401, an X-address decoder 402, a Y-address decoder 403, controlcircuits 404(1) to 404(n), a read/write circuit 405, and otherperipheral circuits (not shown). The other peripheral circuits includean address buffer circuit, a power generation circuit, a boostercircuit, a power control circuit, other control circuits and the like,and are provided as the need arises.

Incidentally, in the present specification, although a writing circuitindicates the whole circuit concerned with a writing operation, there isalso a case where only a part thereof that is concerned with the writingoperation is picked out and is called the writing circuit. For example,in the circuit diagram of the non-volatile memory shown in FIG. 4,although the writing circuit indicates the whole circuit concerned withthe writing operation including the write/read circuit 405 and thecontrol circuits 404, there is also a case where the writing circuitindicates only the write/read circuit 405 as a part thereof. Besides,the same is true of the readout circuit, and although the readoutcircuit indicates the whole circuit concerned with a readout operation,there is also a case where only a part thereof is picked out and iscalled the readout circuit. In the case where it is not clear which onethe word exactly indicates, it is assumed that the word indicates thewhole of the writing circuit and the readout circuit concerned with thewhole operation.

In the non-volatile memory of this embodiment mode, each memory cell isconstituted by a memory transistor MTr and a selection transistor STr.The memory transistor MTr is a memory transistor including a floatinggate, and the selection transistor STr is a normal transistor. As thememory transistor MTr, it is also possible to use a memory element inwhich a charge storage region is spatially discrete, such as a memorytransistor including a cluster layer, or a memory transistor of MNOSstructure or MONOS structure (see embodiment 3). In the case where eachmemory cell stores one-bit data, the non-volatile memory of thisembodiment mode has memory capacity of m×n bits.

In FIG. 4, a memory cell (i, j) (1≦i≦m, 1≦j≦n) is connected to aselection line SLi, a word line WLj, a bit line BLj, and a common sourceline SC. Specifically, the word line WLj is connected to a control gateelectrode of the memory transistor MTr, and the common source line SC isconnected to a source electrode thereof. Besides, the selection line SLiis connected to a gate electrode of the selection transistor STr, andthe bit line BLi is connected to a drain electrode thereof. The memorytransistor MTr and the selection transistor STr constituting the memorycell (i, j) are connected in series with each other. The selection linesSL1 to SLm are connected to the Y-address decoder 403, and the word lineWLj and the bit line BLj are connected to the control circuit 404(j)(1≦j≦n). The control circuits 404(1) to 404(n) are connected to theX-address decoder 402 and the read/write circuit 405.

Next, the control circuits 404(1) to 404(n) will be described. Since allthe n control circuits are equal to one another, hereinafter, one ofthem is exemplified as a control circuit 404. FIG. 5 shows an example ofa circuit diagram of the control circuit 404, and the control circuit404 is constituted by an operational amplifier 501, a constant currentsource 502, and a plurality of switch transistors 503 to 510. One ofinputs of the operational amplifier 501 is connected to a voltage Vin,and the other is connected to the bit line BL through the constantcurrent source 502 and the switch transistors 506 and 508. Besides, theword line WL is connected to the output of the operational amplifier 501through the switch transistors 505 and 507, is connected to an erasevoltage Verase through the switch transistors 503 and 510, and isconnected to a readout voltage Vout through the switch transistors 504and 509.

The switch transistors 503 and 504 to 506 are respectively connected tooutput signals Vxdec(b) and Vxdec(a) of the X-address decoder, theswitch transistors 507 and 508 are connected to a write/read signalSw/r, the switch transistor 509 is connected to a readout signal Sread,and the switch transistor 510 is connected to an erase signal Serase.Further, the output signal Vxdec(a) of the X-address decoder and thewrite/read signal Sw/r are connected to the operational amplifier 501.

As the operational amplifier 501 and the constant current source 502,for example, circuit diagrams shown in FIGS. 6A to 6C and FIG. 7 can beused. FIG. 6A shows a symbol of the operational amplifier 501, andterminals A, B, C, D and E are defined. FIG. 6B is a circuit diagram ofthe operational amplifier 501. The operational amplifier 501 is adifferential amplification circuit constituted by two p-channeltransistors 602 and 603, two n-channel transistors 604 and 605, and aconstant current source 601. Further, as a switch of the operationalamplifier, n-channel switch transistors 606 and 607 are connected inseries with the constant current source. FIG. 6C shows, as the constantcurrent source 601, a current mirror type constant current source madeof a load resistance 610, and two n-channel transistors 608 and 609.FIG. 7 shows a current mirror type constant current source made of aload resistance 703 and two p-channel transistors 701 and 702, as acircuit diagram of the constant current source 502 in FIG. 5. Of course,other well-known circuits may be used as the operational amplifier 501and the constant current source 502.

Next, an operation method of the non-volatile memory of this embodimentmode will be described. Here, writing and readout to the memory cell (1,1), and simultaneous erasing of the memory cells (1, 1) to (1, m) of thefirst column will be described. Of course, a similar operation can becarried out for other memory cells as well. Incidentally, in thisembodiment mode, the description will be given of the case where eachmemory transistor stores two-value data, and a verify operation is notcarried out at the time of writing.

First, before each operation is carried out, the memory cell of thefirst column is selected by the X-address decoder. Specifically, theswitch transistors 503 to 506 constituting the control circuit 404(1)are turned on by the output signal of the X-address decoder, and all theswitch transistor 503 to 506 constituting the control circuits 404(2) to404(n) are turned off. At the same time with the selection of thecontrol circuit 404(1), an operation mode of the control circuit 404(1)is selected by the erase signal Serase, the write/read signal Sw/r, andthe readout signal Sread.

All the switch transistors 509 and 510 connected to the erase signalSerase and the readout signal Sread are turned off in the writingoperation. Hereinafter, a signal by which all switch transistorsconnected to a signal line are turned off is called an off signal, and asignal by which all switch transistors connected to a signal line areturned on is called an on signal. That is, the off signal is inputted asthe erase signal Serase and the readout signal Sread. On the other hand,the on signal is inputted as the write/read signal Sw/r. As a result, acircuit structure concerned with the writing operation to the memorycell (1, 1) can be expressed as in FIG. 8. In FIG. 8, referencecharacter VWL designates a potential of the word line; VBL, a potentialof the bit line; Vsc, a potential of the common source line; Vsel, apotential of the selection line; Vpgm, a writing potential; and I, acurrent supplied by the constant current source. The circuit diagramshown in FIG. 8 is the same as the circuit diagram shown in FIG. 1except for the selection transistor STr, and the operation principlethereof is the same as that already described.

The operation voltage at the time of writing may be made, for example,Vsel=10V, Vsc=GND, Vpgm=6 V, and I=10 mA. An operation point of thememory transistor in this case is shown in FIG. 9. Curves 901 and 902respectively express Vd−Id curves of the memory transistor MTr and theselection transistor STr, and the operation point of the memorytransistor MTr is expressed by an intersection P of the two curves.Here, the conductance of the selection transistor STr is setsufficiently larger than the conductance of the memory transistor MTr.It is preferable that the operation voltage at the time of writing isset such that the writing voltage Vpgm is made to have such a magnitudethat weak impact ionization occurs, and the operation point of thememory transistor is set to be within a saturation region close to alinear region.

The writing operation in which a charge injection speed to the memorycell (1, 1) is constant becomes possible by the foregoing writingmethod. In this embodiment mode, the memory transistor stores one-bit(two values of “0” and “1”) information, nothing is done in the casewhere “0” is written, and the foregoing writing operation is carried outfor the time tw in the case where “1” is written. Incidentally, it isassumed that the writing operation is carried out in the state wherethreshold voltages Vth are well uniform. The time tw is a writing timenecessary for obtaining the state of “1” and is obtained in advance. Inthis embodiment mode, the verify operation is thus not carried out, butonly the writing operation for the time tw is carried out, so that thewriting time can be greatly shortened as compared with the conventionalverify writing. Of course, the reason why such writing operation isenabled is that the threshold distribution having high accuracy and asmall distribution width can be obtained by the writing method of thepresent invention.

In the memory cells (2, 1) to (m, 1) in which writing is not carriedout, the potential Vsel of the selection line is made 0 V, and theselection transistors are turned off. Further, it is necessary to setthe operation voltage at the time of writing so that the potential VWLof the word line at the time of writing has such a degree that erroneouswriting by a tunnel current is not carried out in the memory cells(2, 1) to (m, 1). Besides, with respect to the memory cells other thanthose of the first column, the control circuits 404(2) to 404(n) are innon-selection states, and both the bit line and the word line arebrought into floating states, so that there is no problem of erroneousoperation.

Of course, in a column in which the control circuit 404 is in thenon-selection state, a circuit may be structured so that the bit lineand the word line have 0 V.

Next, a readout operation will be described. In the readout operation,the off signal is inputted as the erase signal Serase, and the on signalis inputted as the write/read signal Sw/r and the readout signal Sread.As a result, a circuit structure concerned with the readout operation tothe memory cell (1, 1) can be expressed as in FIG. 10. In FIG. 10,reference character VWL designates a potential of the word line; VBL, apotential of the bit line; Vsc, a potential of the common source line;Vsel, a potential of the selection line; and Vout, a readout potentialto be outputted. A potential Vread is inputted to an operationalamplifier 1001, and a constant current I is supplied from a constantcurrent source 1002. The circuit diagram shown in FIG. 10 is identicalwith the circuit diagram shown in FIG. 1 except for the selectiontransistor STr and an output portion of the readout potential Vout, andthe operation principle thereof is the same as that already described.

The operation voltage at the time of readout may be made, for example,Vsel=3 V, Vsc=GND, Vread=1 V, and I=1 mA. An operation point of thememory transistor in this case is shown in FIG. 11. Curves 1101 and 1102respectively express Vd−Id curves of the memory transistor MTr and theselection transistor STr, and the operation point of the memorytransistor MTr is expressed by an intersection P of the two curves.Incidentally, the conductance of the selection transistor STr is setsufficiently larger than the conductance of the memory transistor MTr.It is necessary that the operation voltage at the time of readout ismade to satisfy conditions under which hot electrons are not generatedby impact ionization. For that purpose, as shown in FIG. 11, it isappropriate that Vread is set low.

Then, data stored in the memory cell can be read out by reading thereadout potential Vout under this operation voltage. This readoutoperation uses a phenomenon that when the threshold voltage of thememory transistor MTr is increased by ΔVth, the control gate voltage ofthe memory transistor MTr, that is, the readout potential Vout is alsoincreased by ΔVth due to negative feedback characteristics of thecontrol circuit 404(1).

In the memory cells (2, 1) to (m, 1) in which readout is not carriedout, the potential Vsel of the selection line is made 0 V, and theselection transistor is turned off. As a result, the readout potentialVout is determined only for the memory cell (1, 1), and there is no fearof erroneous readout. Besides, since the operation voltage is low, thereis also no problem of erroneous writing. Also with respect to the memorycells other than those of the first column, the control circuits 404(2)to 404(n) are in non-selection states, and both the bit line and theword line are in floating states, so that there is no problem oferroneous operation.

Of course, in a column in which the control circuit 404 is in thenon-selection state, a circuit may be structured such that the bit lineand the word line have 0 V.

Incidentally, in this embodiment mode, although the method of readingthe word line potential is adopted as the readout method, a method ofreading out a bit line potential can also be used.

Finally, an erase operation will be described. At the time of the eraseoperation, the on signal is inputted as the erase signal Serase, and theoff signal is inputted as the write/read signal Sw/r and the readoutsignal Sread. As a result, a circuit structure concerned with the eraseoperation to the memory cells (1, 1) to (m, 1) is expressed as in FIG.12. In FIG. 12, reference character VWL designates a potential of theword line; Vsc, a potential of the common source line; and Vsel(1) toVsel(m), potentials of the selection lines. As shown in FIG. 12, in theerase operation, an operational amplifier and a constant current sourcedo not participate.

As the operation voltage at the time of erasing, it is appropriate thatfor example, VWL is made −8 V, potentials Vsel(1) to Vsel(m) of allselection lines are made 0 V, and a substrate potential (or wellpotential) is made 8 V. As a result, a high potential difference isgenerated between the control gate and the substrate of the memorytransistor constituting the memory cell of the first column, and acharge stored in the floating gate is drawn into the substrate by an FNtunnel current. Incidentally, the selection transistor is turned off,and the drain region of the memory transistor is brought into thefloating state. With respect to the memory cells other than those of thefirst column, the control circuits 404(2) to 404(n) are in thenon-selection state, and the word line is in the floating state, so thatthere is no problem of erroneous erasing. Incidentally, instead ofmaking the substrate potential 8 V, it is also possible to provide apartially overlapping region (overlap region) between the source regionand the floating gate of the memory transistor, and to make the commonsource potential Vsc 8 V.

In order to decrease a distribution width after a writing operation inwhich a verify operation is not carried out, it is naturally necessarythat a distribution width of a threshold voltage before writing issmall. However, in the foregoing erase operation, it is generallydifficult to realize a narrow distribution width. Then, in thisembodiment mode, after the erase operation by the FN tunnel, verifywriting into an erase state is newly carried out. It is preferable thatthe threshold voltage of the erase state is made a value slightly higherthan that of the distribution after erasing. Incidentally, a well-knowncircuit structure and a well-known operation method may be used in theverify writing into the erase state.

In the manner as described above, the writing operation, the readoutoperation, and the erase operation of the non-volatile memory of thepresent invention are carried out. The operation voltages explained inthis embodiment mode are summarized as shown in Table 1. Incidentally,in Table 1, an operation voltage in the case where, as an erase method,a charge is drawn into a source region is written.

TABLE 1 Writing time Readout time Erase time Sw/r ON ON OFF Sread OFF ONOFF Serase OFF OFF ON Vpgm/Vread 6 V 1 V — I 10 mA 1 mA — Vsel 10 V 3 V0 V Vsc 0 V 0 V 8 V Verase — — −8 V  

In this embodiment mode, the two-value non-volatile memory has beendescribed. However, the present invention is not limited to thetwo-value non-volatile memory. Rather, since the feature of thenon-volatile memory of the present invention exists in high accuracythreshold controllability, its effect is exhibited especially in amulti-value non-volatile memory in which a margin of a thresholddistribution is small. When the present invention is applied to themulti-value non-volatile memory, as compared with the prior art, thewriting time can be shortened, and a high multi-value degree can berealized. With respect to an example in which the present invention isapplied to the multi-value memory, reference can be made toembodiment 1. Incidentally, in the present specification, the number ofstates which one memory cell can store is called a multi-value degree.

Besides, in this embodiment mode, although the writing method in whichthe verify operation is not performed has been described, a writingmethod using a verify operation may be carried out, of course. In thatcase, it is appropriate that the writing operation is constituted by afirst writing operation in which the verify operation is not carried outand a second writing operation in which the verify operation is carriedout. Specifically, it is preferable that first, in the first writingoperation, high accuracy threshold control characteristics are activelyused, and writing into a state slightly lower than a final thresholdvoltage is carried out, and then, verify writing as to an insufficiencyof remaining threshold voltage is carried out. As a result, as comparedwith the conventional verify writing, the number of times of verifyoperation can be decreased, and a verify writing time can be shortened.Incidentally, a well-known circuit structure and a well-known operationmethod may be used for the verify writing.

In this embodiment mode, although the writing and readout to the memorycell (1, 1) and the simultaneous erasing of the memory cells (1, 1) to(m, 1) of the first column has been described, it is also possible tosimultaneously carry out these operations over plural columns.Especially, by selecting all the control circuits 404(1) to 404(n), itis possible to carry out the simultaneous writing and readout to thememory cells (1, 1) to (1, n) of the first row, and the simultaneouserasing of all the memory cells. Of course, as the write/read circuit405, a circuit capable of processing n-bit data in parallel becomesnecessary. Besides, it is necessary that the total of amounts ofcurrents simultaneously flowing in the respective operations does notexceed current driving capacity of the circuit.

Incidentally, since the writing method of the present invention usesnegative feedback, there may be a case where it takes a time until theoperation voltage becomes stable. Thus, it is preferable that as theneed arises, a discharge circuit or a precharge circuit is provided inthe control circuit to shorten a period of time until it takes theoperation voltage becomes stable.

Embodiment 1

In this embodiment, a description will be given of an example in which anon-volatile memory of the present invention is applied to a multi-valuememory. The non-volatile memory of the present invention ischaracterized by a writing operation superior in controllability ofthreshold voltage, and its effect is exhibited especially in amulti-value non-volatile memory in which a margin of a thresholddistribution is small. In the multi-value non-volatile memory to whichthe present invention is applied, it is possible to shorten a writingtime as compared with the prior art, and can realize a high multi-valuedegree.

The multi-value non-volatile memory is constituted by a memory elementcapable of storing three or more states. For example, there is a methodof dividing a threshold voltage of a memory element into three or morestates, or a method of using a memory element capable of storingelectric charges in plural places. In this embodiment, a descriptionwill be given of a four-value non-volatile memory which the thresholdvoltage of the memory element is divided into four states, and fourstates of “0” (erase state), “1”, “2” and “3” are stored. FIG. 13 showsdistributions of the threshold voltages expressing the four states. InFIG. 13, Vth0, Vth1, Vth2, and Vth3 are respectively center values ofthe threshold distributions of the states “0”, “1”, “2” and “3”.

FIG. 14 shows a relation between the threshold voltage of the memoryelement and a writing time in the case where the writing method of thepresent invention is used. In FIG. 14, times tw1, tw2, and tw3respectively designate writing times from the erase state “0” to thestates “1”, “2” and “3”. Since the threshold voltage and the writingtime have a linear relation, in the case where intervals between thethreshold voltages of the four states are equal to one another, ratiosbetween tw1, tw2 and tw3 become tw1:tw2:tw3=1:2:3. Like this, in thewriting method of the present invention, writing into the respectivestates can be carried out easily and with high accuracy by controllingthe writing time. More generally, in the case where writing is carriedout by one writing operation, it is appropriate that the ratios betweennecessary writing times are made coincident with the ratios betweenintervals of threshold voltages in the respective states.

For example, in the case where the memory element stores states of kvalues not lower than two values by dividing them into the erase statehaving the threshold voltage Vth0 and the states having (k−1) differentthreshold voltages Vth1, Vth2, . . . Vth(k−1) higher than the thresholdvoltage Vth0, it is appropriate that the ratios between the writingtimes tw1, tw2, . . . , tw(k−1) for writing from the erase state to thestates having the threshold voltages Vth1, Vth2, . . . , Vth(k−1) aremade tw1:tw2: . . . :tw(k−1)=(Vth1−Vth0):(Vth2−Vth0): . . .:(Vth(k−1)−Vth0).

Hereinafter, a circuit structure and an operation method of thefour-value non-volatile memory of the present invention will bedescribed. For simplification, it is assumed that thresholddistributions expressing four-value states are as shown in FIG. 13, andintervals between threshold voltages of the respective states are equalto one another.

The circuit structure of the multi-value non-volatile memory may bebasically made equal to that of the two-value non-volatile memory, andwith respect to a memory cell array, an address decoder, a controlcircuit, and the like, the same circuits as those of the circuitdiagrams shown in FIGS. 4 to 7 can be used. The multi-value circuitstructure is different from the two-value circuit structure mainly in areadout circuit and a writing circuit. In the four-value non-volatilememory, it is necessary that the readout circuit distinguishes betweenfour states and read them out as two-bit data, and the writing circuitcarries out writing into the four states on the basis of the two-bitdata. Accordingly, the readout circuit and the writing circuit becomedifferent for every non-volatile memory (including that of two values)different in the multi-value degree.

As the writing method, one writing operation in which a verify operationis not carried out is considered. In this case, it is appropriate thaton the basis of the inputted two-bit data, the writing operation inwhich the writing time is 0, tw1, tw2, or tw3 is carried out. Thewriting operation may be made similar to the method explained in thisembodiment mode, and the on pulse signal having a width of 0, tw1, tw2or tw3 may be inputted as the write/read signal. Of course, it isdesirable to use, as the operation voltage, an optimum value determinedby the writing time and the like. In the writing method of the presentinvention, since a charge injection speed is constant, writing can becarried out by simple time control in which the ratios of the writingtimes to the four states become 0:1:2:3.

As the readout method, first, similarly to the two-value memory, thereadout potential Vout is read out of the control circuit. The readoutcircuit judges the states “0”, “1”, “2” and “3” according to the valueof the read Vout, and conversion into two-bit data is carried out. Asthe readout circuit, a well-known readout circuit used for aconventional multi-value non-volatile memory can be used.

As the erase method, since it is appropriate that erasing to “0” (erasestate) is carried out irrespective of the state of the memory element,similarly to the two-value memory, the erase operation by the FN tunnelcurrent may be carried out. Incidentally, in the case where the verifyoperation is not carried out in writing, since it is necessary to makethreshold voltages before writing uniform, similarly to the caseexplained in this embodiment mode, it is preferable that the verifywriting into the erase state “0” is carried out after the FN tunnelerasing. A well-known circuit structure and a well-known operationmethod may be used for verify writing into the erase state “0”.

The example of the writing operation will be described in more detail.FIG. 15 shows an example of a writing circuit diagram. A writing circuit1501 is constituted by a latch 1502, a pulse generation circuit 1503,and the like. When two-bit writing data is inputted to the writingcircuit 1501, it is held by the latch 1502, and a plurality of signalsare formed by the pulse generation circuit 1503. These signals aresuitably selected in accordance with the data held in the latch 1502,and are outputted as a writing pulse signal Sw and a writing finishsignal Swf.

FIG. 16 shows a timing chart of the writing pulse signal Sw and thewriting finish signal Swf. As shown in FIG. 16, the writing pulsesignals Sw have different pulse widths on the basis of the inputteddata, and the writing finish signal Swf rises after the writing pulsefalls down and notifies the finish of the writing. Specifically, in thecase where data corresponding to the states “0”, “1”, “2”, or “3” isinputted, the writing signal Sw has the pulse width of 0, tw1, tw2 ortw3, respectively.

The outputted writing pulse signal Sw is connected to the input terminalof an operational amplifier and a switch transistor for switching theconnection with Vpgm and GND. In the case where the writing pulse signalSw is on, Vpgm is connected to the input terminal of the operationalamplifier, and in the case where it is off, GND is connected to theinput terminal of the operational amplifier.

In the foregoing pulse generation circuit 1503, for example, threerising signals in which a time is shifted by tw1, tw2 and tw3 areprepared by a shift register, and pulses having different widths can beprepared by taking an exclusive OR (XOR) to the original signal. Thewriting pulse signal Sw may be selected from the pulse signals havingdifferent widths, and the writing finish signal Swf may be selected fromthe rising signals shifted in time, on the basis of the input data.

In the manner described above, the writing operation, the readoutoperation, and the erase operation of the non-volatile memory of thepresent invention are carried out.

In this embodiment, although the description has been given of thefour-value case in behalf of the multi-value memory, the presentinvention can be applied to the multi-value memory of 8 values, 16values, or higher values quite similarly to this embodiment. Besides, inthis embodiment, although the description has been given of the casewhere intervals between the threshold distributions expressing themulti-value states are uniform, even in the case where the intervalsbetween the threshold distributions expressing the multi-value statesare not uniform, a completely similar operation can be carried out bymerely changing the writing pulse width.

In the writing operation of the present invention, as compared with theprior art, the distribution width of the threshold voltage after writingis small, and the controllability of the distribution is superior, sothat also in the multi-value non-volatile memory, it becomes possible tocarry out writing by one writing operation in which the verify operationis not carried out. Also in the case where the verify operation iscarried out, first, writing (first writing) into a state in whichthreshold voltage is slightly lower than a state after writing iscarried out, and next, verify writing (second writing) is carried out,so that it becomes possible to greatly shorten the writing time.Incidentally, verify writing may be started after confirmation of therising of the writing finish signal Swf. Although a verify writingcircuit is not shown, a well-known circuit structure and a well-knownoperation method may be used.

Besides, the foregoing operation method of the multi-value memory can becarried out simultaneously over plural columns. In that case, a writingcircuit diagram as shown in FIG. 17 can be used. In FIG. 17, a latch1702 is provided for each column, and in accordance with data held inthe latch 1702, a suitable writing pulse signal is selected from acommon pulse generation circuit 1701. As a writing finish signal Swf, itis appropriate that for example, a signal rising after a writing timetw3 is used. In this way, by making the writing operation, the readoutoperation, and the erase operation parallel, the speed of the operationcan be made high.

Incidentally, as a method of controlling a threshold voltage with highaccuracy, although the control method using time as described above ispreferable, more generally, the writing voltage Vpgm and the writingtime are freely set and the writing operation to the respectivemulti-value states may be carried out.

Embodiment 2

In this embodiment, a description will be given of an example which isdifferent from the circuit structure of the non-volatile memorydescribed in this embodiment mode. FIG. 18 is a circuit diagram of anon-volatile memory of this embodiment including a memory cell array ofm rows and n columns (m and n are respectively integers equal to orlarger than 1). The non-volatile memory shown in FIG. 18 is constitutedby a memory cell array 1801, an X-address decoder 1802, a Y-addressdecoder 1803, control circuits 1804(1) to 1804(n), a read/write circuit1805, and other peripheral circuits (not shown). The other peripheralcircuits include an address buffer circuit, a power generation circuit,a boosting circuit, a power control circuit, other control circuits, andthe like, and are provided as the need arises.

Each memory cell is constituted by a memory transistor MTr and aselection transistor STr. The memory transistor MTr is a transistorincluding a floating gate, and the selection transistor STr is a normaltransistor. As the memory transistor MTr, a memory transistor includinga cluster layer, or a memory transistor of MNOS structure or MONOSstructure may be used (see embodiment 3).

In FIG. 18, a memory cell (i, j) (1≦i≦m, 1≦j≦n) is connected to aselection line SLi, a word line WLj, a bit line BLj, and a common sourceline SC. Specifically, one of a source and a drain electrodes of theselection transistor STr is connected to a control gate electrode of thememory transistor MTr, the common source line SC is connected to asource electrode thereof, and the bit line BLi is connected to a drainelectrode thereof. The word line WLj is connected to the remaining oneof the source and the drain electrodes of the selection transistor STr,and the selection line SLi is connected to a gate electrode thereof. Theselection lines SL1 to SLm are connected to the Y-address decoder 1803,and the word line WLj and the bit line BLj are connected to the controlcircuit 1804(j) (1≦j≦n). Besides, the control circuits 1804(1) to1804(n) are connected to the X-address decoder 1802 and the read/writecircuit 1805.

Next, the control circuits 1804(1) to 1804(n) will be described. Sinceall the n control circuits are quite identical to one another, one ofthem is called a control circuit 1804 in behalf of them. FIG. 19 showsan example of a circuit diagram of the control circuit 1804, and thecontrol circuit 1804 is constituted by an operational amplifier 1901, aconstant current source 1902, and a plurality of switch transistors 1903to 1911. Since the operational amplifier 1901, the constant currentsource 1902, and the plurality of switch transistors 1903 to 1910, whichconstitute the control circuit 1804, are quite identical to those of thecontrol circuit shown in FIG. 5, their explanation is omitted. Ascircuit diagrams of the operational amplifier 1901 and the constantcurrent source 1902, for example, the circuit diagrams shown in FIGS. 6and 7 can be used. Of course, another well-known circuit can also beused. The control circuit 1804 is different from the control circuitshown in FIG. 5 in that the former includes a discharge circuit. Thatis, the word line WL is connected to GND through the switch transistor1911. A gate electrode of the switch transistor 1911 is connected to adischarge signal Sdc.

Next, an operation method of the non-volatile memory of this embodimentwill be described. Here, writing and readout to the memory cell (1, 1)and simultaneous erasing of the first column memory cells (1, 1) to (1,m) will be described. Of course, a similar operation can be carried outfor other memory cells. Incidentally, in this embodiment, a descriptionwill be given of a case where each memory transistor stores two-valuedata, and a verify operation is not carried out at the time of writing.

First, before respective operations are carried out, the first columnmemory cells are selected by the X-address decoder. Specifically, theswitch transistors 1903 to 1906 constituting the control circuit 1804(1)are turned on by the output signal of the X-address decoder, and all theswitch transistors 1903 to 1906 constituting the control circuits1804(2) to 1804(n) are turned off. At the same time as the selection ofthe control circuit 1804(1), the operation mode of the control circuit1804(1) is selected by the erase signal Serase, the write/read signalSw/r, and the readout signal Sread.

The feature of the circuit of the memory cell of this embodiment is thatthe selection transistor is connected between the control gate electrodeof the memory transistor MTr and the word line WL. As described below,in the writing and readout operations, since the selection transistorconstituting the row in which an operation is not carried out is turnedoff, the control gate electrode of the memory transistor MTr is broughtinto the floating state. In the driving method of this embodiment, inorder to prevent an erroneous operation from occurring in these memorycells, before the selection transistor is turned off in the writing andreadout operations, the control gate electrodes of all the memorytransistors MTr are connected to GND using the discharge circuit.

First, in the writing operation, the off signal is inputted as the erasesignal Serase and the readout signal Sread, and the on signal isinputted as the write/read signal Sw/r. As a result, a circuit structureconcerned with the writing operation to the memory cell (1, 1) isexpressed as in FIG. 20. In FIG. 20, reference character VWL designatesa potential of the word line; VBL, a potential of the bit line; Vsc, apotential of the common source line; Vsel, a potential of the selectionline; Vpgm, a writing potential; I, a current supplied by the constantcurrent source; and Sdc, a discharge signal. The circuit diagram shownin FIG. 20 is coincident with the circuit diagram shown in FIG. 1 exceptfor the selection transistor STr and the discharge circuit, and theoperation principle is not described since its explanation has alreadybeen given.

The operation voltage at the time of writing may be made, for example,Sdc=0 V, Vsel=12 V, Vsc=GND, Vpgm=6 V, and I=10 mA. It may be consideredthat the operation point of the memory transistor in this case issubstantially the same as the example (see FIG. 9) shown in thisembodiment mode. With respect to the operation voltage at the time ofwriting, it is preferable that the writing voltage Vpgm is made to havesuch a magnitude that weak impact ionization occurs, and the operationpoint of the memory transistor is set to be within a saturation regionclose to a linear region.

In this embodiment, the memory transistor stores one-bit (two values of“0” and “1”) information, and in the case where “0” is written, nothingis done, and in the case where “1” is written, the foregoing writingoperation is carried out for a previously examined time tw.Incidentally, it is assumed that the writing operation is carried outunder the conditions that the threshold voltage Vth is positive and iswell uniform.

Thus in this embodiment, since the verify operation is not carried outbut the writing operation for the time tw is carried out, so that ascompared with the conventional verify writing, the writing time can begreatly shortened. Of course, the reason why such writing operationbecomes possible is that the threshold distribution having high accuracyand small threshold distribution can be obtained by the writing methodof the present invention.

After the writing operation is carried out for the time tw, the writingoperation is finished in the manner described below. First, in thecontrol circuit, the off signal is inputted as the write/read signalSw/r, and the on signal is inputted as the discharge signal Sdc, so thatthe potentials of all the word lines WL are connected to GND. At thesame time, the potentials Vsel of all the selection liens SL are made 3V, and after the control gate electrodes of all the memory transistorare connected to GND, the potentials Vsel of all the selection lines SLare connected to 0 V. At the same time, the off signal is inputted asthe discharge signal Sdc.

Incidentally, in the writing operation, in the memory cells (2, 1) to(m, 1) in which writing is not carried out, the potential Vsel of theselection line is made 0 V, and the selection transistor is turned off.In this case, although the control gate electrodes of the memorytransistors constituting the memory cells (2, 1) to (m, 1) are broughtinto the floating states, as described above, the potential of thecontrol gate is 0 V, and the threshold voltage Vth of the memorytransistor is made uniform to be positive, so that the memory transistoris turned off and there is no fear of erroneous operation. With respectto the memory cells other than the first column, since the controlcircuits 1804(2) to 1804(n) are in the non-selection state, and both thebit line and the word line are in the floating state, there is noproblem of erroneous operation.

Of course, in the column in which the control circuit 1804(i) (i is aninteger of 1 to n) is in the non-selection state, a circuit may beconstructed such that the bit line and the word line have 0 V.

Next, a readout operation will be described. In the readout operation,the off signal is inputted as the erase signal Serase, and the on signalis inputted as the write/read signal Sw/r and the readout signal Sread.As a result, a circuit structure concerned with the readout operation tothe memory cell (1, 1) can be expressed as in FIG. 21. In FIG. 21,reference character VWL designates a potential of the word line; VBL, apotential of the bit line; Vsc, a potential of the common source line;Vsel, a potential of the selection line; Vout, a readout potential to beoutputted; and Sdc, a discharge signal. Besides, a potential Vread isinputted to an operational amplifier 2101, and a constant current I issupplied from a constant current source 2102. The circuit diagram shownin FIG. 21 is coincident with the circuit diagram shown in FIG. 1 exceptfor a selection transistor STr, a discharge circuit, and an outputportion of the readout potential Vout, and the operation principle isthe same as that already explained.

The operation voltage at the time of readout may be made, for example,Sdc=0 V, Vsel=5 V. Vsc=GND, Vread=1 V, and I=1 mA. We may consider thatthe operation point of the memory transistor in this case issubstantially the same as the example (see FIG. 11) shown in thisembodiment mode. It is necessary that the operation voltage at the timeof readout satisfies the conditions under which hot electrons are notgenerated by impact ionization. For that purpose, it is appropriate thatVread is set low.

Data stored in the memory cell can be read out by reading the readoutpotential Vout under this operation voltage. This readout operation usesa phenomenon that when the threshold voltage of the memory transistor isincreased by ΔVth, the control gate voltage of the memory transistor,that is, the readout potential Vout is also increased by ΔVth throughnegative feedback characteristics.

Also after the readout operation is carried out, the control gateelectrodes of all the memory transistors are connected to GND by adischarge operation. First, in the control circuit, the off signal isinputted as the write/read signal Sw/r, and the on signal is inputted asthe discharge signal Sdc, so that the potentials of all the word linesWL are connected to GND. At the same time, the potentials Vsel of allthe selection lines SL are made 3V, and after the control electrodes ofall the memory transistors are connected to GND, the potentials Vsel ofall the selection lines SL are connected to 0 V. At the same time, theoff signal is inputted as the discharge signal Sdc.

Incidentally, in the memory cells (2, 1) to (m, 1) in which readout isnot carried out, the potentials Vsel of the selection lines are made 0V, and the selection transistors are turned off. As a result, the memorytransistors constituting the memory cells (2, 1) to (m, 1) are turnedoff, and the readout potential Vout is determined only by the memorycell (1, 1), so that there is no fear of erroneous readout. Besides,since the operation voltage is low, there is no problem of erroneouswriting as well. With respect to the memory cells other than the firstcolumn, the control circuits 1804(2) to 1804(n) are in the non-selectionstate, and both the bit line and the word line are in the floatingstate, so that there is no problem of erroneous operation.

Incidentally, in this embodiment, although the method of reading out theword line potential is adopted as the readout method, a method ofreading out a bit line potential can also be used.

Finally, an erase operation will be described. At the time of the eraseoperation, the on signal is inputted as the erase signal S erase, andthe off signal is inputted as the write/read signal Sw/r and the readoutsignal Sread. Besides, the off signal is inputted as the dischargesignal Sdc. As a result, a circuit structure concerned with the eraseoperation to the memory cells (1, 1) to (m, 1) is expressed as shown inFIG. 22. In FIG. 22, reference character VWL designates a potential ofthe word line; Vsc, a potential of the common source line; and Vsel(1)to Vsel(m), potentials of the selection lines. As shown in FIG. 22, inthe erase operation, an operation amplifier and a constant currentsource do not participate.

The operation voltage at the time of erasing may be made, for example,VWL=−8 V, the potentials Vsel of all the selection lines=0 V, and asubstrate potential (or well potential)=8 V. As a result, the selectiontransistors constituting the first column memory cells are turned on,and a high potential difference of about 16 V is generated between thecontrol gate and the substrate of the memory transistor. As a result,charges stored in the floating gate are drawn into the substrate throughthe FN tunnel current. Incidentally, the bit line is in the floatingstate. With respect to the memory cells other than the first column, thecontrol circuits 1804(2) to 1804(n) are in the non-selection state, andthe word lines are in the floating state, so that there is no problem oferroneous erasure. Incidentally, instead of making the substratepotential 8 V, it is also possible to provide a partially overlappingregion (overlap region) between the source region of the memorytransistor and the floating gate to make the common source potential Vsc8V.

In order to decrease the distribution width after the writing operationin which the verify operation is not carried out, it is naturallynecessary that the distribution width of the threshold voltage beforethe writing is small. However, in the foregoing erase operation, it isgenerally difficult to realize the narrow distribution width. Then, inthis embodiment, after the erase operation through the FN tunnel, verifywriting into the erase state is newly carried out. It is preferable thatthe threshold voltage of the erase state is 0 V or higher, and is made avalue slightly higher than that of the distribution after erasure.Incidentally, in the verify writing into the erase state, a well-knowncircuit structure and a well-known operation method may be used. Afterthe verify writing into the erase state, the potentials of the controlgates of all the memory cells are made 0 V by the discharge operation.

In the manner described above, the writing operation, the readoutoperation, and the erase operation of the non-volatile memory of thepresent invention are carried out.

In this embodiment, although the two-value non-volatile memory has beendescribed, since the feature of the non-volatile memory of the presentinvention is in the high accuracy threshold controllability, the effectis rather exhibited in the multi-value non-volatile memory in which themargin of the threshold distribution is small. By combining thisembodiment with the embodiment 1, it becomes possible to realize thenon-volatile memory in which the writing time is short and themulti-value degree is high.

Incidentally, in this embodiment, although the writing method in whichthe verify operation is not used has been described, of course, verifywriting may be carried out. Besides, in this embodiment, the method ofwriting and readout to the memory cell (1, 1) and simultaneous erasingof the first column memory cells (1, 1) to (m, 1) have been described,however these operations can be simultaneously carried out over aplurality of columns. The application of these is as described in thisembodiment mode.

Incidentally, in this embodiment, although the threshold voltage of thememory transistor in the erase state is made positive, the presentinvention is not limited to this case. In the case where the thresholdvoltage of the memory transistor in the erase state is negative, thepotential of the control gate is made lower than the threshold voltageof the erase state by the discharge operation, so that an operation canbe carried out in exactly the same manner as this embodiment. Inaddition, it is also effective to make the memory transistor have asplit gate structure.

Embodiment 3

The present invention can be applied to various memory elementsincluding a charge storage region between an active region and a controlgate electrode. Especially, the present invention can also be applied toa memory element in which a semiconductor cluster layer, a metal clusterlayer, or a nitride film is provided as the charge storage region. Thesememory elements are characterized in that a region for storing anelectric charge is spatially discretely provided.

A memory element using a semiconductor or conductor cluster layer as aregion for storing an electric charge is disclosed in, for example,Japanese Patent Publication No. Sho. 49-22356. Its typical sectionalstructure is shown in FIG. 26A. A memory element shown in FIG. 26A is amemory transistor in which a first insulating film 2602, a cluster layer2603, a second insulating film 2605, and a control gate electrode 2606are successively stacked on an active region 2601. The cluster layer2603 is a layer constituted by discrete block-like semiconductor orconductor (called cluster), and this discrete cluster 2604 functions asa charge-trapped center.

As a memory element using a nitride film as a region for storing anelectric charge, MNOS (Metal-Nitride-Oxide-Semiconductor), MONOS(Metal-Oxide-Nitride-Oxide-Semiconductor), and the like are known.Typical sectional structures of the MNOS and the MONOS are shown inFIGS. 26B and 26C, respectively. In the memory element shown in FIG.26B, an oxide film 2608, a nitride film 2609, and a control gateelectrode 2610 are stacked on an active region 2607. In the memoryelement shown in FIG. 26C, an oxide film 2612, a nitride film 2613, anoxide film 2614, and a control gate electrode 2615 are stacked on anactive region 2611. In either case, spatially discrete impurity levelsin the nitride film function as charge-trapped centers.

Also in the case where such a memory element is applied to thenon-volatile memory of the present invention, the circuit structure andthe operation method explained in this embodiment mode can be used asthey are. Of course, it is preferable that optimum values are used forthe operation voltage and the operation current in each element.

In the case where an element in which a region for storing an electriccharge is discretely provided is used as a memory element, there is aneffect that a charge holding characteristic is hardly influenced by adefect of a tunnel oxide film or a pin hole. For example, like a memorytransistor including a floating gate as shown in FIG. 26D, in the casewhere a region for storing an electric charge is continuously provided,if one pin hole exists in the tunnel oxide film, since all chargesstored in the floating gate leak through the pin hole, it has a largeinfluence on the charge holding characteristic of the memory transistor.However, in the case where an element in which regions for storingelectric charges are discretely provided is used, a region receiving theinfluence of the pin hole is limited, and many charge storage regions donot receive the influence of the pin hole, so that the influence on thecharge holding characteristic of the memory element is little.

Incidentally, the memory transistor including the floating gate is amemory transistor in which as shown in FIG. 26D, a first insulating film2617, a floating gate electrode 2618 made of a semiconductor film or aconductive film, a second insulating film 2619, and a control gateelectrode 2620 are successively stacked over an active region 2616.

In the case where the memory element of this embodiment is applied tothe non-volatile memory of the present invention, it is preferable toapply it especially to a multi-value memory. Since the multi-valuenon-volatile memory does not have a large margin of threshold voltagesexpressing different states, it is well known that high accuracythreshold control at the time of writing or erasing, and an excellentcharge holding characteristic become necessary. Since the non-volatilememory of the present invention is excellent in the controllability ofthreshold voltage, the present invention is especially effective for themulti-value non-volatile memory, as already described in this embodimentmode and the embodiment 1.

On the other hand, with respect to the charge holding characteristicwhich is another problem of the multi-value non-volatile memory, itbecomes possible to make a substantial improvement by using the memoryelement of this embodiment. Thus, it can be said that the memory elementdescribed in this embodiment is especially preferable when the presentinvention is applied to the multi-value non-volatile memory.

Incidentally, the structure of this embodiment can be freely combinedwith any structure of the embodiments 1 and 2.

Embodiment 4

In this embodiment, a microprocessor such as an RISC processor and anASIC processor will be described in which nonvolatile memories of thepresent invention are integrated on one chip.

FIG. 23 shows an exemplary microprocessor. The microprocessor istypically composed of a CPU core 2301, a flash memory 2304 (which may bea RAM), a clock controller 2303, a cache memory 2302, a cache controller2305, a serial interface 2306, an I/O port 2307, and the like. Needlessto say, the microprocessor shown in FIG. 23 is a simplified example, andan actual microprocessor is various designed depending upon its use.

In the microprocessor shown in FIG. 23, the CPU core 2301, the clockcontroller 2303, the cache controller 2305, the serial interface 2306,and the I/O port 2307 are composed of a CMOS circuit. As the flashmemory 2304, the nonvolatile memory of the present invention is used,and a multi-valued flash memory utilizing a pinning memory transistor isused. As the circuit configuration of the flash memory 2304, that shownin Embodiment modes and Embodiments 1 to 3 may be used, or the othercircuit configurations may be used. It is also possible to utilize thenonvolatile memory of the present invention for the cache memory 2302.

Further, the microprocessor of this embodiment can be used any structureof combination of Embodiments 1 to 3.

Embodiment 5

The nonvolatile memory of the present invention can be incorporated intoelectronic equipment in various fields, as a recording medium forstoring/reading data. In this embodiment, such electronic equipment willbe described.

Examples of the electronic equipment that can utilize the nonvolatilememory of the present invention include a display, a video camera, adigital camera, a head mount display, a DVD player, a game machine, agoggle-type display, a car navigation, an acoustic reproducing apparatus(a car mounted audio, etc.), a personal computer, a portable informationterminal (a mobile computer, a mobile phone, an electronic dictionary,etc.), and the like. FIGS. 24A-24F and 25A-25B illustrate examplesthereof.

FIG. 24A shows a display that includes a housing 2401, a supporter 2402,a display portion 2403, and the like. The present invention is connectedto the display portion 2403 and other signal control circuits, and usedfor correcting an image signal and storing processing data.

FIG. 24B shows a video camera that is composed of a body 2411, a displayportion 2412, a voice input portion 2413, an operation switch 2414, abattery 2415, and an image-receiving portion 2416. The present inventionis incorporated into a built-in LSI substrate and used for storing imagedata and the like.

FIG. 24C shows a part (right chip side) of a head mount displayincluding a body 2421, a signal cable 2422, a head portion fixing band2423, a display portion 2424, an optical system 2425, a displayapparatus 2426, and the like. The present invention is connected to thedisplay apparatus 2426 and other signal control circuits, and used forcorrecting an image signal and storing processing data.

FIG. 24D shows an image reproducing apparatus (more specifically, a DVDreproducing apparatus) provided with a recording medium, which iscomposed of a body 2431, a recording medium 2432, an operation switch2433, a display portion (a) 2434, a display portion (b) 2435, and thelike. This apparatus uses as a recording medium a digital versatile disc(DVD), a compact disc (CD), and the like so as to allow a user to listento music, see movies, play games, and browse the Internet. The presentinvention is incorporated into a built-in LSI substrate and used forstoring image data and processing data.

FIG. 24E shows a goggle type display that includes a body 2441, adisplay portion 2442, and an arm portion 2443. The present invention isconnected to the display portion 2442 and other signal control circuits,and used for correcting an image signal and storing processing data.

FIG. 24F shows a personal computer that is composed of a body 2451, ahousing 2452, a display portion 2453, a keyboard 2454, and the like. Thepresent invention is incorporated into a built-in LSI substrate, andused for storing processing data and image data.

FIG. 25A shows a mobile phone that includes a body 2501, a voice outputportion 2502, a voice input portion 2503, a display portion 2504, anoperation switch 2505, and an antenna 2506. The present invention isincorporated into a built-in LSI substrate, and used for adding anaddress function of recording telephone numbers.

FIG. 25B shows an acoustic reproducing apparatus (more specifically, acar audio system) which includes a body 2511, a display portion 2512,and operation switches 2513 and 2514. The present invention isincorporated into a built-in LSI substrate, and used for storing imagedata and processing data. Furthermore, in this embodiment, a car mountedaudio system is illustrated. However, a portable or domestic acousticreproducing apparatus may be used.

As described above, the application range of the present invention isvery wide, so that the present invention is applicable to electronicequipment in various fields. Furthermore, the electronic equipment ofthis embodiment can also be realized even by using the configurationformed of any combination of Embodiments 1 to 3.

In the non-volatile memory of the present invention, by controlling adrain voltage and a drain current of a memory element, it becomespossible to carry out high accuracy threshold control in a writingoperation.

As a result, it becomes possible to decrease the number of verify timesat verify writing, and further, a writing method without using a verifysystem becomes possible, so that as compared with the prior art, itbecomes possible to realize substantial shortening of a writing time.

In the case where the present invention is applied especially to amulti-value non-volatile memory, an effect of shortening of a writingtime is large. Further, in the case where a transistor includingdiscrete charge storage regions is used as a memory element, it ispossible to provide a multi-value non-volatile memory which is excellentin charge holding characteristic and also in threshold controllabilityat the time of writing.

By mounting the non-volatile memory of the present invention excellentin the threshold controllability, it is possible to provide asemiconductor device including a non-volatile memory capable of carryingout a high speed writing and erasing operation. As a result, anelectronic equipment which incorporates the non-volatile memory of thepresent invention can shorten a waiting time for data processing.Further, the non-volatile memory of the present invention can beadjusted to high speed CPU.

1-73. (canceled)
 74. A semiconductor device comprising: a transistorincluding a gate electrode which can take a floating state, a sourceelectrode and a drain electrode, wherein charge injection into the gateelectrode which can take the floating state is carried out by bringingan amount of current flowing through the transistor and a drain voltageof the transistor into a constant state, and wherein an amount of chargeinjection into the gate electrode which can take the floating state iscontrolled by controlling a period of time for a current flows to thetransistor.
 75. A semiconductor device according to claim 74, whereinthe gate electrode which can take the floating state contains asemiconductor film or a conductive film.
 76. A semiconductor deviceaccording to claim 74, further comprising a control gate electrode overthe gate electrode which can take the floating state.
 77. Asemiconductor device according to claim 76, further comprising aswitching transistor in which one of source electrode and a drainelectrode thereof is electrically connected to the control gateelectrode.
 78. A semiconductor device according to claim 74, wherein thetransistor stores multi-value data.
 79. A semiconductor device accordingto claim 74, wherein a verify operation is not carried out in a writingoperation of the transistor.
 80. A semiconductor device according toclaim 74, wherein the semiconductor device is incorporated in oneselected from the group consisting of a camera, a goggle type display, aDVD player, a computer, a telephone and an audio player.
 81. Asemiconductor device comprising: a transistor including a gate electrodewhich can take a floating state, a source electrode and a drainelectrode, wherein one of the source electrode and the drain electrodeis grounded, wherein charge injection into the gate electrode which cantake the floating state is carried out by bringing an amount of currentflowing through the transistor and a drain voltage of the transistorinto a constant state, and wherein an amount of charge injection intothe gate electrode which can take the floating state is controlled bycontrolling a period of time for a current flows to the transistor. 82.A semiconductor device according to claim 81, wherein the gate electrodewhich can take the floating state contains a semiconductor film or aconductive film.
 83. A semiconductor device according to claim 81,further comprising a control gate electrode over the gate electrodewhich can take the floating state.
 84. A semiconductor device accordingto claim 83, further comprising a switching transistor in which one ofsource electrode and a drain electrode thereof is electrically connectedto the control gate electrode.
 85. A semiconductor device according toclaim 81, wherein the transistor stores multi-value data.
 86. Asemiconductor device according to claim 81, wherein a verify operationis not carried out in a writing operation of the transistor.
 87. Asemiconductor device according to claim 81, wherein the semiconductordevice is incorporated in one selected from the group consisting of acamera, a goggle type display, a DVD player, a computer, a telephone andan audio player.